机械外文翻译--利用PDMA制造的MEMS直立平面线圈式感应器的发展现状

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1、外文原文：http:/ 中文 2800 字  DevelopmentofMEMSVerticalPlanarCoilInductorsThroughPlasticDeformationMagnetic Assembly (PDMA) JinghongChen*,JunZou*,ChangLiu*andSung-Mo(Steve)Kang*  AgereSystems,Holmdel,NJ07733DepartmentofElectricalandComputerEngineering, UniversityofIllinoisatUrbana-Champaign,Urban

2、a,IL61801JackBaskinSchoolofEngineering,UniversityofCalifornia,SantaCruz ABSTRACT  Thispaperpresentstheresultsofthedevelopmentofaverticalplanarcoilinductor.Theplanarcoilinductorisfirstfabricatedonsiliconsubstrateandthenassembledtotheverticalpositionbyusinganovel3-Dimensionalbathscaleself-assembl

3、yprocess(PlasticDeformationMagneticAssembly(PDMA).Inductorsofdifferentdimensionsarefabricatedandtested.TheS-parametersoftheinductorsbeforeandafterPDMAaremeasuredandcompared,demonstratingsuperiorperformanceduetoreducedsubstrateeffectsandalsoincreasedsubstratespacesavingsfortheverticalplanarcoilinduct

4、ors. Key wordsMEMS,planarcoilinductor,qualityfactor,PDMA,resonancefrequency.  1 INTRODUCTION  Withthedevelopmentofintegratedwirelesscommunicationsystems,on-chipinductorswithsatisfactoryperformance(enoughqualityfactorandselfresonantfrequency)arerequired.However,theconventionalplanarcoilindu

5、ctorsuffersfromsubstratelossesandparasiticssinceitisdirectlyfabricatedontoconductivesubstrateoveraverythindielectriclayer1. Inrecentyears,muchefforthasbeenmadetoimprovetheperformanceofplanarcoilinductors.Metalmaterialswithhigherconductivityorthickermetallayersareutilizedtodecreasetheresistanceofthec

6、oil.Meanwhile,differentmethodsareproposedtoreducethesubstratelossandparasitics,includingremovingthesubstrateunderneaththeinductor2,applyingathickpolymidelayertoseparatetheinductorfartherawayfromthesubstrate3,etc.Morerecently,planarcoilinductorslevitatedabovethesubstratearerealizedusingasacrificialme

7、tallicmode(SMM)process4.3-Dimensional solenoidon-chipinductors developed by using3-Dlaser lithographyorsurfacemicromachiningtechnologyhavealsobeendemonstrated5,6.Thispaperreportsverticalplanarcoilinductorsdevelopedbyusinganovel3-Dself-assemblyprocess-PlasticDeformationMagneticAssembly(PDMA).Experime

8、ntalresultsshowthattheverticalplanarcoilinductorsufferslesssubstratelossandparasiticsthantheconventionalhorizontalcounterparts,andthuscanachieveahigherquality(Q)factorandself-resonantfrequency.Anothermajoradvantageoftheverticalinductorsisthattheyhavealmostzerofootprintsandthusoccupymuchsmallersubstr

9、atespace. 2 PLASTICDEFORMATIONMAGNETIC ASSEMBLY(PDMA)    Fig.1AschematicillustrationofaPlasticDeformationMagneticAssemblyprocess(PDMA) PDMAisthekeytechnologytorealizetheverticalplanarcoilinductors.Adetaileddiscussionofthisassemblyprocesswillbepresentedinotherpublications.Abriefintroduction

10、ofPDMAisgivenbelowbyusinga cantileverbeamasanexample.Notethattheregionnearthefixedendisintentionallymademoreflexible.First,a cantileverbeamwitha pieceof magneticmaterial attached to itstop surfaceis releasedfromthesubstrate by etchingawaythe sacrificiallayerunderneath(Fig.1(a).Next,a magneticfieldHe

11、xtisapplied,themagneticmaterialpieceismagnetizedandthecantileverbeamwillberotatedoffthesubstratebythemagnetictorquegeneratedinthemagneticmaterialpiece(Fig.1(b).Ifthestructureisdesignedproperly,thisbendingwillcreateaplasticdeformationintheflexibleregion.Thecantileverbeamwillthenbeabletoremainatacerta

12、inrestangle()abovethesubstrateevenafterHextisremoved(Figure1(c).Byusingductilemetal(e.g.gold)intheflexibleregion,agoodelectrical connection betweentheassembled structureandthesubstratecanbeeasilyachieved,whichissuitableforRFapplications.Aftertheverticalassembly,thestructurescanbefurtherstrengtheneda

13、ndthemagneticmaterialcanberemovedifnecessary.Ifthemagneticfieldisappliedglobally,then allthestructuresononesubstratecanbeassembledinparallel.  3 DESIGNAND FABRICATION  Thecorestructureoftheverticalplanarcoilinductorisidenticaltotheconventionalhorizontalone,whichconsistsoftwometallayersando

14、nedielectriclayerbetween.Asageneralrule,highconductivitymetaland lowlossdielectricmaterialshouldbeused.Inadditiontothisrequirement,thestructureoftheinductorshouldfacilitatetheimplementationofPDMA. Theverticalplanarcoilinductorutilizesone-portcoplanarwaveguide(CPW)configurationwith3testpads(Ground-Si

15、gnal-Ground)withapitchof150m.Thethreetestpadsalsoserveastheanchoroftheverticalinductorsonthesubstrate. 3.1 MaterialConsideration  Goldisusedasthematerialforthebottomconductor(thecoil).Goldisaductilematerialwithhighconductivity.ItisanidealplasticdeformationmaterialfortheimplementationofPDMA.Copp

16、erisselectedasthematerialofthetopconductor(thebridge).Copperisalsoahighconductivitymetalanditsprocessingiscompatiblewiththegoldbottomconductorduringthefabrication.SiliconoxideandnitridearegooddielectricmaterialsavailableinsiliconICprocess.However,theyarenotsuitableforverticalplanarcoilinductorsduetohighinternalstressandpooradhesiononmetal