1、中文摘要 外差干涉测量仪的研究 摘 要 外差干涉测量仪又称双频干涉仪或交流干涉仪， 它具有精度高、 应用范围广、 环境适应能力强、实时动态测速高等一系列无可比拟的优势，因而被广泛应用于 几何量计量活动。它是利用两种不同频率的单色光作为测量光束和参考光束， 通 过光电探测器的混频，输出差频信号。同时被测物体的位移变化引起的光波相位 或频率的变化载于此差频上，经解调即可获得被测数据。 本文便是根据外差干涉 测量仪的发展，对外差干涉测量仪的原理、应用及其在测量微小位移方面的原理 进行了详细介绍和软件模拟。 关键词：外差干涉测量仪，单频激光干涉仪，测距，激光，声光调制器 Abstract II Abs
2、tract Heterodyne interferometer, also known as dual frequency interferometer or AC interferometer, has a high precision, wide range of applications, the ability to adapt to the environment, higher real-time dynamic velocimetry and other unparalleled advantages. And that makes it become the main forc
3、e of geometrical measurement activities. Heterodyne interferometer uses two different frequency of monochromatic light as the measuring light beam and reference beam, by the mixing of the photoelectric detector. It output the difference frequency signal. Phase change of light-wave caused by the disp
4、lacement of the object displacement contained in this difference frequency can be obtained by demodulation of the measured data. This article is according to the development of heterodyne interferometer, to make a particular simulation and summary for the principle and application at small displacement measuring by heterodyne interferometer. Key words: heterodyne interferometer, a single wavelength interferometric measurement, distance measurement, laser, acousto-optic modulator 目录 III 目 录 摘 要
