1、 1 毕毕 业业 论论 文文 薄膜制造技术与工艺的研究薄膜制造技术与工艺的研究 学院:电子信息工程学院 专业：光电子技术 2014 年 11 月 17 日 2 摘要：摘要：根据太阳电池阵激光防护膜性能优化的需要，应用离子辅助电子束双源共 蒸工艺方法制备了优化设计所需的特定折射率的薄膜材料并用于制备激光防护 膜。 测试结果显示：用该工艺方法制备的掺杂材料薄膜的折射率 n .， 与优化设计所需数值相符；激光防护膜性能优良，太阳辐射能透过率提高以 上，实现了对该激光防护膜性能的进一步优化。 为了使该双源共蒸方法适于大 面积薄膜的制备， 应用均匀性挡板技术来提高该方法制备大面积薄膜的膜厚均匀 性，使制
2、备的掺杂材料薄膜在口径为 时的不均匀性小于.。 该双源共蒸方法制备工艺简单、可靠，适于实际工程应用。 薄膜性能测试结果 与理论优化结果相符，达到预期优化目标。 关关 键键 词：词：薄膜材料；激光防护膜；折射率；掺杂；双源共蒸 3 Abstract：According to the solar cell array laser protective film performance optimization, application of ion assisted beam double source preparation needed for the optimal design metho
3、ds of steaming process specific refractive index of thin film materials and used for the preparation of laser protective film. Test results show that using the process method of the preparation of doped materials film refractive index n = 1 . 75, consistent with the numerical optimization design; La
4、ser protective film, the excellent performance of solar radiation transmittance increased by more than 6%, achieved to optimize the performance of the laser protective film. In order to make the double source with steaming method is suitable for the preparation of large area of thin film, applicatio
5、n of uniformity of damper technology to improve the method preparation of large area of film thickness uniformity, make preparation of doped material thin film when the diameter is 400 mm the inhomogeneity of less than % 2 .1. The dual-source were steaming method preparation technology is simple, re
6、liable and suitable for engineering application. Membrane performance test results and the theory of optimization results of the desired optimization goal .Key Words：Thin film materials; Laser protective film; The refractive index. Doping; Dual-source were steamed. 4 目目 录录 引引 言言5 1.11.1 光学薄膜简介光学薄膜简介.5 1.1.11.1.1 简介简介5 1.1.21.1.2 特点特点5 1.1.31.1.3 分类分类5 1.1.41.1.4 制备制备6 1.1.51.1.5 应用应用6 1.21.2 光学薄膜的发展及分类、关键技术汇总光学薄膜的发展及分类、关键技术汇总.7 2 2 特定折射率材料的需求特定折射率材料的需求.9 3.3.特定折射率材
