1、 中文 4564 字 出处： 第七届亚洲气溶胶会议论文集 . 2011 附录 英文文献翻译 An Experiment on Energy Reduction of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms Kyung-Hoon Yoo 1 , Gen-Soo Song 1 , Hyung-Tae Kim 1 , Seung-Woo Son 2 and Dug-Jun Park 3 1 Nanoscale Contam
2、ination Control Laboratory, Korea Institute of Industrial Technology (KITECH), 1271-18, Sa-1-dong, Ansan-si, 426-171, Gyeonggi-do, South Korea 2 Sunglim PS Co., 1301, Namseong Plaza, 345-30, Gasan-dong, Geumcheon-gu, Seoul, 153-802 3 Shinsung ENG Co., 404-1, Baekhyeon-dong, Bundang-gu, Seongnam-si,
3、463-420 ABSTRACT In recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor air conditioning system represents about 45 % of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room
4、. From an energy conservation point of view, heat recovery from the exhaust air is therefore usefulfor reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by uti
5、lizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a pre-heater, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scr
6、ubber. It was shown from the lab-scale experiment with outdoor air flow of 1,000 m3/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer. KEYWORDS:Semiconductor Manufacturing Clean Room, Outdoor Air
7、 Conditioning System, Air Washer,Heat Recovery, Energy Reduction. Introduction For recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor airconditioning (hereafter OAC) system represents about 45 % of the total air conditioning loadrequired to maintain a clean room env
8、ironment 1,2 . In addition, there is a large quantity ofexhaust air from a clean room, leading to the consequent large amount of waste heat. From anenergy saving point of view, heat recovery fromthe exhaust air is therefore helpful for reducingthe outdoor air conditioning load for aclean room. Recen
9、tly, air washers have been sometimesused in OAC systems for semiconductor manufacturing clean rooms to control humidity andsimultaneously remove suspended dusts and gaseous contaminants such as NH 3 , SOx, NOx andorganic gases in incoming outdoor air, as shown in Figure 1. Meanwhile, since the exhau
10、st aircarries chemically toxic gaseous matter, a wet scrubber has to be used to handle it before it isdischarged to the atmosphere. In the wet scrubber the heat transfer between the exhaust air andthe scrubbing water always takes place. The transferred heat deserves utilizing to heat or cool theinco
11、ming outdoor air, which needs to be contacted indirectly with the scrubbing water because ofprotection from contamination. Figure 1. Schematic diagram of the proposed energyefficient outdoor air conditioning system with an air washerof heat recovery function. So far only a few studies regarding the
12、air washer with the heat recovery function forsemiconductor clean rooms have been conducted by Fujisawa et al. 3,4 , Shiroma et al. 5 andYamamoto et al. 6 . None of the above mentioned publications seems to have been describedsufficiently in detail to allow the understanding of the overall energy co
13、nsumption and savingperformance of the OAC system. They focused only on heat recovery equipment, not on theOAC system itself. Therefore the effect of air conditioning process constraints such as supply aircondition and the combination with heating/cooling coils on the energy saving performance of an
14、energy-efficient OAC system design needs to be taken into account. In the present work, anenergy-efficient OAC system was proposed to reduce the outdoor air conditioning load byutilizing the air washer with heat recovery function based on the previous work by Fujisawa etal. 3,4 and Yamamoto et al. 6
15、 . The proposed OAC system consisted mainly of air filters, a pre-heater, an air washer, two stage cooling coils, a reheating coil, a humidifier, and two heatrecovery cooling coils inserted into the air washer and connected to a wet scrubber, as shown inFigure 2. An experiment was carried out on the lab-scale with an air flow of 1000 m3/h regardingenergy consumption and saving of the proposed energy-efficient OAC system compared with theOAC system with a simple air washer.
