1、Development of Sensor New Technology Sensor is one kind component which can transform the physical quantity, chemistry quantity and the biomass into electrical signal. The output signal has the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can sati
2、sfy the signal transmission, processing, recording, and demonstration and control demands. So it is the automatic detection system and in the automatic control industry .If automatic Technology is used wider, then sensor is more important. In information age, the information industry includes inform
3、ation gathering, transmission, process three parts, namely sensor technology, communication, computer technology. Because of ultra large scale integrated circuits rapid development after having been developed Modern computer technology and communication, not only requests sensor precision reliabilit
4、y, speed of response and gain information content request more and more high but also requests its cost to be inexpensive. The obvious traditional sensor is eliminated gradually because of the function, the characteristic, the volume, the cost and so on. As world develop many countries are speeding
5、up to the sensor new technologys research and the development, and all has obtained the enormous breakthrough. Now the sensor new technology development mainly has following several aspects: Using the physical phenomenon, the chemical reaction, the biological effect as the sensor principle therefore
6、 the researches which discovered the new phenomenon and the new effect are the sensor technological improving ways .it is important studies to developed new sensors the foundation. Japanese Sharp Corporation uses the superconductivity technology to develop successfully the high temperature supercond
7、uctivity magnetic sensor and get the sensor technology significant breakthrough. Its sensitivity is so high and only inferior in the superconductivity quantum interference component. Its manufacture craft is far simpler than the superconductivity quantum interference component. May use in magnetism
8、image formation technology. So it has the widespread promoted value. Using the immune body and the antigen meets one another compound when the electrode surface. It can cause the electrode potential change and use this phenomenon to be possible to generate the immunity sensor. The immunity sensor ma
9、kes with this kind of immune body may to some organism in whether has this kind of ant original work inspection. Like may inspect somebody with the hepatitis virus immune body whether contracts the hepatitis, plays to is fast, the accurate role. The US UC sixth branch has developed this kind of sens
10、or. The sensor material is the important foundation for sensor technology, because the materials science is progressive and the people may make each kind of new sensor For example making the temperature sensor with the high polymer thin film； The optical fiber can make the pressure, the current capa
11、city, the temperature, the displacement and so on the many kinds of sensors； Making the pressure transmitter with the ceramics. The high polymer can become the proportion adsorption and the release hydrogen along with the environment relative humidity size. The high polymer electricity lies between
12、the constant to be small, the hydrogen can enhance the polymer the coefficient of dialectical loss. Making the capacitor the high polymer dielectric medium, determines the electric capacity cape city the change, then obtains the relative humidity. Making the plasma using this principle to gather the
13、 legitimate polystyrene film temperature sensor below, it has the characteristic. Measured the wet scope is wide； The temperature range is wide, may reach -400 +1,500 ； The speed of response is quick, is smaller than 1S； The size is small, may use in the small space measuring wet； The temperature co
14、efficient is small. The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy film electronic technology, its technical performance is stable, the year drifting quantity
15、is smaller than 0.1%F.S, warm floats is smaller than 0.15%/10K, anti- overloads strongly, may reach the measuring range several hundred times. The survey scope may from 0 to 60mpa.German E+H Corporation and the American Kahlo Corporation product is at the leading position. The optical fiber applicat
16、ion is send the material significant breakthrough, its uses in most early the optical communication techniques. In the optical communication use discovered works as environmental condition change and so on the temperature, pres-sure, electric field, magnetic field, causes the fiber optic transmissio
17、n light wave intensity, the phase, the frequency, change and so on the polarization condition, the survey light wave quantity change, may know causes these light wave physical quantity the and so on quantitative change temperature, pressure ,electric field, magnetic field size, uses these principles
18、 to be possible to develop the optical fiber sensor. The optical fiber sensor and the traditional sensor compare has many characteristics: Sensitivity high, the structure simple, the volume small, anti-corrosive, the electric insulation good, the path of rays may be curving, be advantageous for the
19、realization telemeter and so on. Optical fiber sensor Japan is in the advanced level. Like Idec Izumi Corporation and Sun x Corporation. The optical fiber send receiver and the integrated path of rays technology unify, accelerates the optical fiber sensor technology development. Will integrate the p
20、ath of rays component to replace the original optics part and the passive light component； enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low. In semiconductor technology processing method oxygenation, the photo
21、etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semicon
22、ductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on. The Japanese horizontal river company uses various guides corrosion technology to carry on the high accura
23、cy three dimensional processing； the system helps the silicon resonance type pressure transmitter. The core partially presses two resonant Liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liangs frequency difference correspondence di
24、fferent pressure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same cha
25、nge quantity can counterbalance mutually. Its survey most high accuracy may reach 0.01%FS. American Silicon Microstructure Inc.(SMI) the company develops a series of low ends, linear in 0.1% to 0.In 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1KPa), it m
26、akes take the silicon as the material, has the unique three dimensional structure, the light slight machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti- e
27、ffect but to lose the bridge balance, the output and the pressure becomes the proportion the electrical signal. Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several
28、 dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter
29、. The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily
30、the temperature influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shortcoming and so on slow change, had the precision high, th
31、e re-liability is high, the volume small characteristic, widely used in domain and so on aviation, petroleum, chemical industry, medical service. Integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxilia
32、ry circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to compensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Co
33、rporation will develop, each week will be able to produce 10,000. The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor unifies, it has at the same time the examination, the judgment and the information processing function, compa
34、res with the traditional sensor has very many characteristics: Has the judgment and the information processing function, can carry on the revision, the error to the observed value compensates, thus enhancement measuring accuracy； May realize the multi-sensor multi parameters survey； Has from the diagnosis and from the calibration function, enhances the reliability； The survey data
